MEMS-based Electromagnetic Membrane Actuator Utilizing Bonded Magnets for Micropump | Tokyo Tech Research Repository (T2R2)

Publication Information

Title

Japanese:
English:	MEMS-based Electromagnetic Membrane Actuator Utilizing Bonded Magnets for Micropump

Author

Japanese:	QI Chao, 韓冬, 進士忠彦.
English:	Chao QI, Dong Han, Tadahiko Shinshi.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

P-2

Published date

Mar. 14, 2020

Publisher

Japanese:
English:

Conference name

Japanese:
English:	SAMCON2020

Conference site

Japanese:
English:	Tokyo

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