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Title
Japanese:表面粗さパラメータ計測の不確かさ見積もりの試み—バーチャル表面粗さ測定機の構築— 
English: 
Author
Japanese: 尾形佳昭, 原 精一郎, 笹島和幸.  
English: Yoshiaki Ogata, Seiichiro Hara, KAZUYUKI SASAJIMA.  
Language Japanese 
Journal/Book name
Japanese:精密工学会春期大会学術講演論文集 
English: 
Volume, Number, Page        
Published date Mar. 2013 
Publisher
Japanese: 
English: 
Conference name
Japanese:精密工学会春期大会学術講演会 
English: 
Conference site
Japanese: 
English: 

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