Property Control of Ferroelectric HfO2 Films

Publication Information

Title

Japanese:
English:	Property Control of Ferroelectric HfO2 Films

Author

Japanese:	舟窪浩, 三村和仙, 清水荘雄.
English:	Hiroshi Funakubo, Takanori Mimura, Takao Shimizu.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

June 19, 2019

Publisher

Japanese:
English:

Conference name

Japanese:
English:	EM-NANO 2019 (The Seventh International Symposium on Organic and Inorganic Electronic Materials and Related Nanotechnologies)

Conference site

Japanese:
English:	Nagano