Preparation of Mg2Si-based thin films and these properties

Publication Information

Title

Japanese:
English:	Preparation of Mg2Si-based thin films and these properties

Author

Japanese:	片桐淳生, 上原睦雄, 清水荘雄, 松島正明, 秋山賢輔, 内田寛, 木村好里, 舟窪浩.
English:	A. Katagiri, M. Uehara, T. Shimizu, M. Matsushima, K. Akiyama, H. Uchida, Y. Kimura, H. Funakubo.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

July 20, 2019

Publisher

Japanese:
English:

Conference name

Japanese:
English:	APAC-SILICIDE 2019 (The Fifth Asia-Pacific Conference on Semiconducting Silicides and Related Materials)

Conference site

Japanese:
English:	Miyazaki