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Title
Japanese:スパッタリング法を用いたY: HfO2強誘電体膜の室温成膜 
English: 
Author
Japanese: 三村和仙, 清水荘雄, 舟窪浩.  
English: Takanori Mimura, Takao Shimizu, HIROSHI FUNAKUBO.  
Language Japanese 
Journal/Book name
Japanese: 
English: 
Volume, Number, Page        
Published date Sept. 18, 2019 
Publisher
Japanese: 
English: 
Conference name
Japanese:第80回応用物理学会秋季学術講演会 
English: 
Conference site
Japanese:札幌市 
English: 

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