Preparation and characterization of Y, Zr-doped HfO2 thin films by PLD method

Publication Information

Title

Japanese:
English:	Preparation and characterization of Y, Zr-doped HfO2 thin films by PLD method

Author

Japanese:	田代裕貴, 三村和仙, 清水荘雄, 舟窪浩.
English:	Yu-ki Tashiro, Takanori Mimura, Takao Shimizu, Hiroshi Funakubo.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

Sept. 22, 2019

Publisher

Japanese:
English:

Conference name

Japanese:
English:	CJFMA11 (The 11th China and Japan Symposium on Ferroelectric Materials and TheirApplications)

Conference site

Japanese:
English:	Nanjing