Preparation of ferroelecttic HfO2 film with a nm-order thickness

Publication Information

Title

Japanese:
English:	Preparation of ferroelecttic HfO2 film with a nm-order thickness

Author

Japanese:	Takao Shimizu, Takanori Mimura, Hiroshi Funakubo.
English:	Takao Shimizu, Takanori Mimura, HIROSHI FUNAKUBO.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

Sept. 22, 2019

Publisher

Japanese:
English:

Conference name

Japanese:
English:	CJFMA11 (The 11th China and Japan Symposium on Ferroelectric Materials and TheirApplications)

Conference site

Japanese:
English:	Nanjing