Recent Progress on Ferroelectric HfO2 Epitaxial Films

Publication Information

Title

Japanese:
English:	Recent Progress on Ferroelectric HfO2 Epitaxial Films

Author

Japanese:	清水荘雄, 三村和仙, 舟窪浩.
English:	Takao Shimizu, Takanori Mimura, Hiroshi Funakubo.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

Nov. 3, 2019

Publisher

Japanese:
English:

Conference name

Japanese:
English:	19th US-Japan Seminar on Dielectric and Piezoelectric Ceramics

Conference site

Japanese:
English:	Tsukuba