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Publication Information
Title
Japanese:
スパッタリング法を用いたY:HfO2強誘電体厚膜の作製とその電気特性評価
English:
Author
Japanese:
志村礼司郎
,
三村和仙
,
清水荘雄
,
舟窪浩
.
English:
Reijiro Shimura
,
Takanori Mimura
,
Takao Shimizu
,
HIROSHI FUNAKUBO
.
Language
Japanese
Journal/Book name
Japanese:
English:
Volume, Number, Page
Published date
Nov. 28, 2019
Publisher
Japanese:
English:
Conference name
Japanese:
第39回電子材料研究討論会
English:
Conference site
Japanese:
名古屋市
English:
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Tokyo Institute of Technology All rights reserved.