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Title
Japanese:スパッタリング法を用いたY:HfO2強誘電体厚膜の作製とその電気特性評価 
English: 
Author
Japanese: 志村礼司郎, 三村和仙, 清水荘雄, 舟窪浩.  
English: Reijiro Shimura, Takanori Mimura, Takao Shimizu, HIROSHI FUNAKUBO.  
Language Japanese 
Journal/Book name
Japanese: 
English: 
Volume, Number, Page        
Published date Nov. 28, 2019 
Publisher
Japanese: 
English: 
Conference name
Japanese:第39回電子材料研究討論会 
English: 
Conference site
Japanese:名古屋市 
English: 

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