Good Step Coverage of Iridium Metal Films by Spray CVD

Publication Information

Title

Japanese:
English:	Good Step Coverage of Iridium Metal Films by Spray CVD

Author

Japanese:	河野和久, Yoshiyuki Seki, Yutaka Sawada, 舟窪浩, Noriaki Oshima.
English:	Kazuhisa Kawano, Yoshiyuki Seki, Yutaka Sawada, Hiroshi Funakubo, Noriaki Oshima.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

Dec. 1, 2019

Publisher

Japanese:
English:

Conference name

Japanese:
English:	2019 MRS Fall Meeting & Exhibit

Conference site

Japanese:
English:	Boston