Infrared spectroscopic analysis of reactively formed La-silicate interface layer at La2O3/Si substrates

Publication Information

Title

Japanese:
English:	Infrared spectroscopic analysis of reactively formed La-silicate interface layer at La2O3/Si substrates

Author

Japanese:	角嶋邦之, 関拓也, 若林整, 筒井一生, 岩井洋.
English:	"K. Kakushima", "T. Seki", "H. Wakabayashi", "K. Tsutsui", "H. Iwai".

Language

English

Journal/Book name

Japanese:
English:	Vacuum

Volume, Number, Page

Vol. 149 pp. 14-18

Published date

June 2017

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English:

DOI