Impact of Thin La2O3 Insertion for HfO2 MOSFET

Publication Information

Title

Japanese:
English:	Impact of Thin La2O3 Insertion for HfO2 MOSFET

Author

Japanese:	角嶋邦之, 岡本晃一, 足立学, 舘喜一, S. Sato, 川那子高暢, Jin Jisong, AHMET PARHAT, 杉井信之, 筒井一生, 服部健雄, 岩井洋.
English:	K. Kakushima, K. Okamoto, M. Adachi, K. Tachi, S. Sato, T. Kawanago, J. Song, P. Ahmet, N. Sugii, K. Tsutsui, T. Hattori, H. Iwai.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

May 18, 2008

Publisher

Japanese:
English:

Conference name

Japanese:
English:	213th ECS Meeting

Conference site

Japanese:
English:	Phoenix