A Fast Look Up Table Based Lithography Simulator with SOCS Model for OPC Algorithm

Publication Information

Title

Japanese:
English:	A Fast Look Up Table Based Lithography Simulator with SOCS Model for OPC Algorithm

Author

Japanese:	SHAMEEM Tahsin Binte, 高橋篤司, 田邊容由, 小平行秀, 児玉親亮.
English:	Tahsin Binte Shameem, Atsushi Takahashi, Hiroyoshi Tanabe, Yukihide Kohira, Chikaaki Kodama.

Language

English

Journal/Book name

Japanese:	DAシンポジウム2020 論文集
English:	Proc. DA Symposium 2020, IPSJ Symposium Series

Volume, Number, Page

pp. 142-149

Published date

Sept. 2020

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English: