A feature selection method for weak classifier based hotspot detection

Publication Information

Title

Japanese:
English:	A feature selection method for weak classifier based hotspot detection

Author

Japanese:	高橋秀和, 小椋弘貴, 佐藤真平, 高橋篤司, 児玉親亮.
English:	Hidekazu Takahashi, Hiroki Ogura, Shimpei Sato, Atsushi Takahashi, Chikaaki Kodama.

Language

English

Journal/Book name

Japanese:
English:	Proc. SPIE 11328, Design-Process-Technology Co-optimization for Manufacturability XIV, 113281E

Volume, Number, Page

pp. 1-7

Published date

Mar. 23, 2020

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English:

File

DOI