Chapter 4 - Epitaxial Growth of Doped HfO2 Ferroelectric Materials

Publication Information

Title

Japanese:
English:	Chapter 4 - Epitaxial Growth of Doped HfO2 Ferroelectric Materials

Author

Japanese:	清水荘雄, 舟窪浩.
English:	Takao Shimizu, Hiroshi Funakubo.

Language

English

Journal/Book name

Japanese:
English:	Ferroelectricity in Doped Hafnium Oxide: Materials, Properties and Devices

Volume, Number, Page

pp. 173-192

Published date

Apr. 2019

Publisher

Japanese:
English:	Woodhead Publishing

Conference name

Japanese:
English:

Conference site

Japanese:
English: