A 100-nG/√Hz-Level Single Au Proof-Mass 3-Axis MEMS Accelerometer with Pillar-Shaped electrodes

Publication Information

Title

Japanese:
English:	A 100-nG/√Hz-Level Single Au Proof-Mass 3-Axis MEMS Accelerometer with Pillar-Shaped electrodes

Author

Japanese:	市川崇志, 渥美賢, 古賀達也, 山根大輔, 飯田慎一, 伊藤浩之, 石原昇, 町田克之, 益一哉.
English:	Takashi Ichikawa, Ken Atsumi, Tatsuya Koga, Daisuke Yamane, Shin-ichi Iida, Hiroyuki Ito, Noboru Ishihara, Katsuyuki Machida, Kazuya Masu.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

June 2020

Publisher

Japanese:
English:

Conference name

Japanese:
English:	Design, Test, Integration & Packaging of MEMS/MOEMS

Conference site

Japanese:
English: