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Publication Information
Title
Japanese:
吸着対象物としてのポリマーフィルムの表面導電性が双極型静電吸着デバイスの発生力に与える影響
English:
The effect of a target polymer film's surface conductivity on the attractive force generated by a bipolar electrostatic chuck
Author
Japanese:
ジェレミー ガブリエル
,
田岡 祐樹
,
齊藤 滋規
.
English:
Jeremy GAVRIEL
,
Yuki TAOKA
,
Shigeki SAITO
.
Language
Japanese
Journal/Book name
Japanese:
2021年度精密工学会春季大会学術講演会講演論文集
English:
Volume, Number, Page
Published date
Mar. 16, 2021
Publisher
Japanese:
English:
Conference name
Japanese:
2021年度精密工学会春季大会学術講演会
English:
Conference site
Japanese:
English:
©2007
Institute of Science Tokyo All rights reserved.