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Publication Information
Title
Japanese:
スパッタリング法によるY-HZO強誘電体厚膜の室温製膜とその電気特性および圧電特性評価
English:
Author
Japanese:
志村礼司郎
,
三村和仙
,
舘山明紀
,
清水荘雄
,
白石貴久
,
舟窪浩
.
English:
Reijiro Shimura
,
Takanori Mimura
,
Akinori Tateyama
,
Shimizu Takao
,
Takahisa Shiraishi
,
HIROSHI FUNAKUBO
.
Language
Japanese
Journal/Book name
Japanese:
English:
Volume, Number, Page
Published date
Mar. 16, 2021
Publisher
Japanese:
English:
Conference name
Japanese:
第68回応用物理学会春季学術講演会
English:
Conference site
Japanese:
English:
©2007
Tokyo Institute of Technology All rights reserved.