種々のZr/(Zr+Ti)比を有する分極軸配向正方晶PZTエピタキシャル膜の特性評価

Publication Information

Title

Japanese:	種々のZr/(Zr+Ti)比を有する分極軸配向正方晶PZTエピタキシャル膜の特性評価
English:

Author

Japanese:	大越春香, 森川友秀, 舘山明紀, 小寺正徳, 白石貴久, 江原祥隆, 舟窪浩.
English:	Haruka Okoshi, Tomohide Morikawa, Akinori Tateyama, Masanori Kodera, Takahisa Shiraishi, Yoshitaka Ehara, HIROSHI FUNAKUBO.

Language

Japanese

Journal/Book name

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Volume, Number, Page

Published date

Mar. 16, 2021

Publisher

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Conference name

Japanese:	第68回応用物理学会春季学術講演会
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Conference site

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English: