N-type conduction of sputter-deposited polycrystalline Al0.78Sc0.22N films by Si ion implantation

Publication Information

Title

Japanese:
English:	N-type conduction of sputter-deposited polycrystalline Al0.78Sc0.22N films by Si ion implantation

Author

Japanese:	片岡淳司, TSAI Sung Lin, 星井拓也, 若林整, 筒井一生.
English:	Junji Kataoka, Sung-Lin Tsai, Takuya Hoshii, Hitoshi Wakabayashi, Kazuo Tsutsui.

Language

English

Journal/Book name

Japanese:
English:	Applied Physics Express (APEX)

Volume, Number, Page

No. 2 pp. 21002

Published date

Jan. 2021

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English:

DOI