Ferroelectric HfO2 Capacitors for Varctor Application in GHz

Publication Information

Title

Japanese:
English:	Ferroelectric HfO2 Capacitors for Varctor Application in GHz

Author

Japanese:	LIN Yu-Wei, 水谷一翔, 星井拓也, 若林整, 筒井一生, Y.-F. Tsao, T.-J. Huang, H.-T. Hsu, 角嶋邦之.
English:	Y.-W. Lin, K. Mizutani, T. Hoshii, H. Wakabayashi, K. Tsutsui, Y.-F. Tsao, T.-J. Huang, H.-T. Hsu, K. Kakushima.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

Oct. 2020

Publisher

Japanese:
English:

Conference name

Japanese:
English:	Electrochemical Society (ECS) PRIME 2020

Conference site

Japanese:
English:	Hawaii