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Title
Japanese: 
English:Importance of MoS2-Compound Sputtering even with Sulfur-Vapor Anneal for Chip-Size Fabrication 
Author
Japanese: 今井 慎也, 濱田 拓也, 濱田 昌也, 白倉 孝典, 冨谷 茂隆, 宗田 伊理也, 角嶋 邦之, 辰巳 哲也, 筒井 一生, 若林 整.  
English: Shinya Imai, Takuya Hamada, Masaya Hamada, Takanori Shirokura, Shigetaka Tomiya, Iriya Muneta, Kuniyuki Kakushima, Tetsuya Tatsumi, Kazuo Tsutsui, Hitoshi Wakabayashi.  
Language English 
Journal/Book name
Japanese: 
English: 
Volume, Number, Page        
Published date Sept. 2020 
Publisher
Japanese: 
English: 
Conference name
Japanese: 
English:International Conference of Solid State Devices and Materials (SSDM) 2020 
Conference site
Japanese: 
English: 

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