Japanese
Home
Search
Horizontal Search
Publication Search
( Advanced Search )
Patent Search
( Advanced Search )
Research Highlight Search
( Advanced Search )
Researcher Search
Search by Organization
Support
FAQ
T2R2 User Registration
Doctoral thesis registration
Support/Contact
About T2R2
What's T2R2?
Operation Guidance
Leaflets
About file disclosure
Related Links
Tokyo Tech
STAR Search
NII IR Program
Home
>
Help
Publication Information
Title
Japanese:
English:
Importance of MoS2-Compound Sputtering even with Sulfur-Vapor Anneal for Chip-Size Fabrication
Author
Japanese:
今井 慎也
,
濱田 拓也
,
濱田 昌也
,
白倉 孝典
,
冨谷 茂隆
,
宗田 伊理也
,
角嶋 邦之
,
辰巳 哲也
,
筒井 一生
,
若林 整
.
English:
Shinya Imai
,
Takuya Hamada
,
Masaya Hamada
,
Takanori Shirokura
,
Shigetaka Tomiya
,
Iriya Muneta
,
Kuniyuki Kakushima
,
Tetsuya Tatsumi
,
Kazuo Tsutsui
,
Hitoshi Wakabayashi
.
Language
English
Journal/Book name
Japanese:
English:
Volume, Number, Page
Published date
Sept. 2020
Publisher
Japanese:
English:
Conference name
Japanese:
English:
International Conference of Solid State Devices and Materials (SSDM) 2020
Conference site
Japanese:
English:
©2007
Tokyo Institute of Technology All rights reserved.