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Publication Information
Title
Japanese:
[23a-P08-1] 高濃度ホウ素ドープシリコンターゲットを用いたp型微結晶シリコンの作製と評価
English:
[23a-P08-1] Investigation of p-type Microcrystalline Silicon Sputtered Using Highly Boron Doped Silicon Sputtering Target, 宮島 晋介
Author
Japanese:
白取 優大
,
宮島 晋介
.
English:
Yuta Shiratori
,
Shinsuke Miyajima
.
Language
Japanese
Journal/Book name
Japanese:
English:
Volume, Number, Page
Published date
Sept. 21, 2021
Publisher
Japanese:
English:
Conference name
Japanese:
第82回 応用物理学会秋季学術講演会
English:
The 82nd JSAP Autumn Meeting 2021
Conference site
Japanese:
English:
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