[10p-N104-14] スパッタによって作製したTOPCon構造の評価

Publication Information

Title

Japanese:	[10p-N104-14] スパッタによって作製したTOPCon構造の評価
English:	[10p-N104-14] Characterization of TOPCon structure using sputtered a-Si:H layers

Author

Japanese:	宮本拓実, 白取優大, 宮島晋介.
English:	Takumi Miyamoto, Yuta Shiratori, Shinsuke Miyajima.

Language

Japanese

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

Sept. 21, 2021

Publisher

Japanese:
English:

Conference name

Japanese:	第82回応用物理学会秋季学術講演会
English:	The 82nd JSAP Autumn Meeting 2021

Conference site

Japanese:
English: