[18a-Z29-4] スパッタによるa-Si:H膜を用いたTOPCon構造形成の検討

Publication Information

Title

Japanese:	[18a-Z29-4] スパッタによるa-Si:H膜を用いたTOPCon構造形成の検討
English:	[18a-Z29-4] Fabrication of TOPCon structure using sputtered a-Si:H layers

Author

Japanese:	宮本拓実, 白取優大, 宮島晋介.
English:	Takumi Miyamoto, Yuta Shiratori, Shinsuke Miyajima.

Language

Japanese

Journal/Book name

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English:

Volume, Number, Page

Published date

Mar. 16, 2021

Publisher

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English:

Conference name

Japanese:	第68回応用物理学会春季学術講演会
English:	The 68the JSAP Spring Meeting 2021

Conference site

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English: