Fast 3D lithography simulation by convolutional neural network

Publication Information

Title

Japanese:
English:	Fast 3D lithography simulation by convolutional neural network

Author

Japanese:	田邊容由, 佐藤真平, 高橋篤司.
English:	Hiroyoshi Tanabe, Shimpei Sato, Atsushi Takahashi.

Language

English

Journal/Book name

Japanese:
English:	Proc. SPIE 11614, Design-Process-Technology Co-optimization XV 2021, 116140M

Volume, Number, Page

pp. 1-8

Published date

Feb. 22, 2021

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English:

File

DOI