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Title
Japanese: 
English:Comprehensive study on the kinetic formation of the orthorhombic ferroelectric phase in epitaxial Y-doped ferroelectric HfO2 thin films 
Author
Japanese: 田代 裕貴, 清水 荘雄, 三村 和仙, 舟窪 浩.  
English: Yuki Tashiro, Takao Shimizu, Takanori Mimura, Hiroshi Funakubo.  
Language English 
Journal/Book name
Japanese: 
English:ACS Applied Electronic Materials 2021 
Volume, Number, Page Vol. 3    No. 7    pp. 3123-3130
Published date June 2021 
Publisher
Japanese: 
English: 
Conference name
Japanese: 
English: 
Conference site
Japanese: 
English: 
DOI https://doi.org/10.1021/acsaelm.1c00342

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