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Title
Japanese: 
English:Effect of Metastable Quenching by Oxygen Admixture on Excited-State Populations of Low-Pressure Ar Plasma 
Author
Japanese: 土谷裕介, 根津篤, 赤塚洋.  
English: Yusuke Tsuchiya, Atsushi Nezu, Hiroshi Akatsuka.  
Language English 
Journal/Book name
Japanese: 
English:Proceedings of 42nd International Symposium on Dry Process 
Volume, Number, Page         pp. 59-60
Published date Nov. 18, 2021 
Publisher
Japanese: 
English:Program Committee of 42nd International Symposium on Dry Process 
Conference name
Japanese: 
English:42nd International Symposium on Dry Process 
Conference site
Japanese: 
English: 
Official URL http://www.dry-process.org/2021/poster_program.html
 
Abstract To examine the possibility of OES measurement of electron etemperature and density of low-pressure discharge Ar-O2 mixture plasmas, the effect of quenching of argon metastable states by collisions with oxygen molecules is discussed using the collisional-radiative model of argon plasma. It was confirmed that not only the metastable level but also the density of other excited states decreased as the O2 mixing rate increased. However, it was found that the effect differs depending on the level.

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