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Title
Japanese: 
English:Effect of electron energy distribution function on spectroscopic measurement of excited-state densities of non-equilibrium argon plasma 
Author
Japanese: 工月佑太, 根津篤, 赤塚洋.  
English: Yuta Kuzuki, Atsushi Nezu, Hiroshi Akatsuka.  
Language English 
Journal/Book name
Japanese: 
English:Proceedings of 42nd International Symposium on Dry Process 
Volume, Number, Page         pp. 63-64
Published date Nov. 18, 2021 
Publisher
Japanese: 
English:Program Committee of 42nd International Symposium on Dry Process 
Conference name
Japanese: 
English:42nd International Symposium on Dry Process 
Conference site
Japanese: 
English: 
Official URL http://www.dry-process.org/2021/poster_program.html
 
Abstract The effect of the electron energy distribution function on the emission spectroscopy was investigated in two ways, assuming a Maxwellian electron energy distribution and using the distribution function obtained from the probe measurement. As a result, the distribution function obtained from the probe measurement gives the closer excited-state densities to the result of the emission spectroscopy.

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