Thickness dependence of phase stability in epitaxial (HfxZr1-x)O2 films

Publication Information

Title

Japanese:
English:	Thickness dependence of phase stability in epitaxial (HfxZr1-x)O2 films

Author

Japanese:	三村和仙, 清水荘雄, 勝矢良雄, 坂田修身, 舟窪浩.
English:	Takanori Mimura, Takao Shimizu, Yoshio Katsuya, Osami Sakata, Hiroshi Funakubo.

Language

English

Journal/Book name

Japanese:
English:	Physical review materials

Volume, Number, Page

Vol. 5 pp. 114407

Published date

Nov. 2021

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English:

DOI