Stability and Room Temperature Deposition of Ferroelectric Phase in Y-Doped (Hf, Zr)O2 Films

Publication Information

Title

Japanese:
English:	Stability and Room Temperature Deposition of Ferroelectric Phase in Y-Doped (Hf, Zr)O2 Films

Author

Japanese:	舟窪浩, 三村和仙, 志村礼司郎, Yoshiko Nakamura, 清水荘雄.
English:	Hiroshi Funakubo, Takanori Mimura, Reijiro Shimura, Yoshiko Nakamura, Takao Shimizu.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

Apr. 2021

Publisher

Japanese:
English:

Conference name

Japanese:
English:	2021 Virtual MRS Spring Meeting & Exhibit

Conference site

Japanese:
English: