Low temperature preparation of thick Y-HfO2 ferroelectric films

Publication Information

Title

Japanese:
English:	Low temperature preparation of thick Y-HfO2 ferroelectric films

Author

Japanese:	舟窪浩, 志村礼司郎, 三村和仙, 舘山明紀, Nakamura, Y., 清水荘雄, Yamada, T., Tanaka, Y., Inoue, Y..
English:	Funakubo, H., Shimura, R., Mimura, T., Tateyama, A., Nakamura, Y., Shimizu, T., Yamada, T., Tanaka, Y., Inoue, Y..

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

Sept. 20, 2021

Publisher

Japanese:
English:

Conference name

Japanese:
English:	E-MRS (2021 Fall Meeting of the European Materials Research Society)

Conference site

Japanese:
English: