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Title
Japanese:２原子分子気体放電プラズマの発光分光計測と原子分子過程 
English:Optical Emission Spectroscopy (OES) Measurement and Atomic/Molecular Processes of Diatomic Molecular Gas-Discharge Plasma 
Author
Japanese: 赤塚 洋.  
English: Hiroshi AKATSUKA.  
Language Japanese 
Journal/Book name
Japanese:シリコンテクノロジー 
English: 
Volume, Number, Page     No. 234   
Published date Mar. 15, 2022 
Publisher
Japanese:公益社団法人 応用物理学会 
English:Japan Society of Applied Physics 
Conference name
Japanese:応用物理学会シリコンテクノロジー分科会 第234回 研究集会 
English: 
Conference site
Japanese: 
English: 
Official URL https://annex.jsap.or.jp/silicon/activity/studyGroup/234
 
Abstract A theoretical method to calculate optical emission spectrum emitted from several typical excited diatomic molecular species in plasmas is described based on molecular spectroscopic data, which makes possible to determine the vibrational and rotational temperatures of the molecular species in the plasma. The physical meaning of the rotational temperature is explained as an approximate value of the gas temperatures in plasmas. By the non-equilibrium characteristics in the vibrational or rotational structures, some examples are introduced to understand the excitation kinetics to generate reactive radicals or atoms in the plasmas. The most fundamental method to describe the excitation kinetics of some excited species including atoms is also introduced with the Boltzmann analysis of electrons in the nitrogen and oxygen plasmas.

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