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Title
Japanese:微細毛静電チャックの表面柔軟性確保のためのシート状交互五層（導電層、絶縁層）高分子複合材料の開発 
English: 
Author
Japanese: 駒田ひろ, 田岡祐樹, 宝田亘, 齋藤滋規.  
English: Hiro Komada, Yuki Taoka, wataru takarada, Shigeki SAITO.  
Language Japanese 
Journal/Book name
Japanese:2022年度精密工学会春季大会学術講演会論文集 
English: 
Volume, Number, Page        
Published date Mar. 15, 2022 
Publisher
Japanese:公益財団法人精密工学会 
English: 
Conference name
Japanese:2022年度精密工学会春季大会学術講演会 
English: 
Conference site
Japanese:東京都 
English: 

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