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Title
Japanese:梁先端に回転自由度 を有する微細毛双極 型静電チャックの開 発 
English: 
Author
Japanese: 凌智寛, 田岡祐樹, 齋藤滋規.  
English: Tomohiro Ryo, Yuki Taoka, Shigeki SAITO.  
Language Japanese 
Journal/Book name
Japanese:2022年度精密工学会春季大会学術講演会論文集 
English: 
Volume, Number, Page        
Published date Mar. 15, 2022 
Publisher
Japanese: 
English: 
Conference name
Japanese:2022年度精密工学会春季大会学術講演会 
English: 
Conference site
Japanese:東京都 
English: 

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