A MEMS accelerometer with a single axis two proof masses for a wide detection range

Publication Information

Title

Japanese:
English:	A MEMS accelerometer with a single axis two proof masses for a wide detection range

Author

Japanese:	内山晃宏, 市川崇志, 柴田滉平, 飯田慎一, 李尚曄, 石原昇, 町田克之, 益一哉, 伊藤浩之.
English:	Akihiro Uchiyama, Takasi Ichikawa, Kohei Shibata, Shinichi Iida, Sangyeop Lee, Noboru Ishihara, Katsuyuki Machida, Kazuya Masu, Hiroyuki Ito.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

June 2021

Publisher

Japanese:
English:

Conference name

Japanese:
English:	Transducers

Conference site

Japanese:
English: