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Title
Japanese:ワイドレンジAu錘1軸MEMS加速度センサの検討 
English: 
Author
Japanese: 内山晃宏, 柴田滉平, 大西哲, 市川崇志, 飯田慎一, 李尚曄, 石原昇, 町田克之, 益一哉, 伊藤浩之.  
English: Akihiro Uchiyama, Kohei Shibata, Akira Onishi, Takasi Ichikawa, Shinichi Iida, Sangyeop Lee, Noboru Ishihara, Katsuyuki Machida, Kazuya Masu, Hiroyuki Ito.  
Language Japanese 
Journal/Book name
Japanese: 
English: 
Volume, Number, Page        
Published date Nov. 2021 
Publisher
Japanese: 
English: 
Conference name
Japanese:第13回集積化MEMSシンポジウム 
English: 
Conference site
Japanese: 
English: 

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