No-Heating Deposition of 1-μm-Thick Y-Doped HfO2 Ferroelectric Films with Good Ferroelectric and Piezoelectric Properties by Radio Frequency Magnetron Sputtering Method

Publication Information

Title

Japanese:
English:	No-Heating Deposition of 1-μm-Thick Y-Doped HfO2 Ferroelectric Films with Good Ferroelectric and Piezoelectric Properties by Radio Frequency Magnetron Sputtering Method

Author

Japanese:	志村礼司郎, 三村和仙, 舘山明紀, 白石貴久, 清水荘雄, 山田智明, Yoshitomo Tanaka, Yukari Inoue, 舟窪浩.
English:	Reijiro Shimura, Takanori Mimura, Akinori Tateyama, Takahisa Shiraishi, Takao Shimizu, Tomoaki Yamada, Yoshitomo Tanaka, Yukari Inoue, Hiroshi Funakubo.

Language

English

Journal/Book name

Japanese:
English:	Phys. Status Solidi RRL

Volume, Number, Page

Early View

Published date

Jan. 14, 2022

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Japanese:
English:

Conference name

Japanese:
English:

Conference site

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DOI