Field cycling behavior and breakdown mechanism of ferroelectric Al0.78Sc0.22N films

Publication Information

Title

Japanese:
English:	Field cycling behavior and breakdown mechanism of ferroelectric Al0.78Sc0.22N films

Author

Japanese:	TSAI Sung Lin, 星井拓也, 若林整, 筒井一生, Tien-Kan Chung, Edward Yi Chang, 角嶋邦之.
English:	Sung-Lin Tsai, Takuya Hoshii, Hitoshi Wakabayashi, Kazuo Tsutsui, Tien-Kan Chung, Edward Yi Chang, Kuniyuki Kakushima.

Language

English

Journal/Book name

Japanese:
English:	Japanese Journal of Applied Physics (JJAP)

Volume, Number, Page

Vol. 61

Published date

May 2022

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English: