Side-Contact Architecture for p/n-Stacked-Nano-Sheet ZrS2 2D-FETs Beyond 1-nm Technology Node

Publication Information

Title

Japanese:
English:	Side-Contact Architecture for p/n-Stacked-Nano-Sheet ZrS2 2D-FETs Beyond 1-nm Technology Node

Author

Japanese:	濱田昌也, 濱田拓也, 角嶋邦之, 筒井一生, 若林整.
English:	Masaya Hamada, Takuya Hamada, Kuniyuki Kakushima, Kazuo Tsutsui, Hitoshi Wakabayashi.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

June 2021

Publisher

Japanese:
English:

Conference name

Japanese:
English:	International Workshop on Junction Technology (IWJT2021)

Conference site

Japanese:
English: