Introduction of surface field-plate for accurate minority carrier lifetime estimation of 4H-SiC epitaxial layer

Publication Information

Title

Japanese:
English:	Introduction of surface field-plate for accurate minority carrier lifetime estimation of 4H-SiC epitaxial layer

Author

Japanese:	西澤実起, 星井拓也, 若林整, 筒井一生, I. Mizushima, 依田孝, 角嶋邦之.
English:	Mitsuki Nishizawa, T. Hoshii, H. Wakabayashi, K. Tsutsui, I. Mizushima, T. Yoda, K. Kakushima.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

Nov. 2021

Publisher

Japanese:
English:

Conference name

Japanese:
English:	International Workshop on Dielectric Thin Films for Futre Electron Devices -Science and Technology-

Conference site

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English: