Development of Bipolar Electrostatic Chuck with a Beam-Array Assembly Fabricated by Lithography

Publication Information

Title

Japanese:
English:	Development of Bipolar Electrostatic Chuck with a Beam-Array Assembly Fabricated by Lithography

Author

Japanese:	田岡祐樹, 河鰭康平, HEMTHAVY PASOMPHONE, 崔勝萬, 高橋邦夫, 齋藤滋規.
English:	Yuki Taoka, Kohei Kawabata, Pasomphone Hemthavy, Seungman Choi, Kunio Takahashi, Shigeki Saito.

Language

English

Journal/Book name

Japanese:
English:	International Journal of Automation Technology

Volume, Number, Page

Vol. 16

No. 4

pp. 471-477

Published year/month

2022/7

Publisher

Japanese:
English: