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Home > Help Publication Information Title Japanese:   English: Data augmentation in EUV lithography simulation based on convolutional neural network  Author Japanese: 田邊 容由, 高橋 篤司.   English: Hiroyoshi Tanabe, Atsushi Takahashi.   Language English  Journal/Book name Japanese:   English:   Volume, Number, Page         Published date May 26, 2022  Publisher Japanese:   English:   Conference name Japanese:   English: Proc. SPIE 12052, Advanced Lithography + Patterning 2022, 120520T  Conference site Japanese:   English: California  File DOI https://doi.org/10.1117/12.2615267

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