Development of bipolar electrostatic chucks with a compliant beam-array assembly from composite-laminated plates using abrasive water jet

Publication Information

Title

Japanese:
English:	Development of bipolar electrostatic chucks with a compliant beam-array assembly from composite-laminated plates using abrasive water jet

Author

Japanese:	凌智寛, 田岡祐樹, 齋藤滋規.
English:	Ryo Tomohiro, Yuki Taoka, Shigeki Saito.

Language

English

Journal/Book name

Japanese:
English:	MRS Advances

Volume, Number, Page

Published date

Aug. 2022

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English: