Influence of sputtering power on the switching and reliability of ferroelectric Al0.7Sc0.3N films

Publication Information

Title

Japanese:
English:	Influence of sputtering power on the switching and reliability of ferroelectric Al0.7Sc0.3N films

Author

Japanese:	澁川涼太, TSAISung Lin, 星井拓也, 若林整, 筒井一生, 角嶋邦之.
English:	Ryota Shibukawa, Sung Lin Tsai, Takuya Hoshii, Hitoshi Wakabayashi, KAZUO TSUTSUI, Kuniyuki KAKUSHIMA.

Language

English

Journal/Book name

Japanese:
English:	Japanese Journal of Applied Physics

Volume, Number, Page

Volume 61

Published date

Apr. 1, 2022

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English: