Co-Zr-O nano granular thin films formed with facing target sputtering system | Tokyo Tech Research Repository (T2R2)

Publication Information

Title

Japanese:
English:	Co-Zr-O nano granular thin films formed with facing target sputtering system

Author

Japanese:	高村陽太.
English:	Y. Takamura.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

DA442

Published date

Oct. 12, 2022

Publisher

Japanese:
English:

Conference name

Japanese:
English:	Invited Talk in Northeastern University

Conference site

Japanese:	ボストン
English:	Boston

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