Fabrication of Flexible Coil on PDMS for MEMS-based Electromagnetic Membrane Actuator

Publication Information

Title

Japanese:
English:	Fabrication of Flexible Coil on PDMS for MEMS-based Electromagnetic Membrane Actuator

Author

Japanese:	QI Chao, Atsushi Nakazato, 杉田直広, 進士忠彦.
English:	Chao Qi, Atsushi Nakazato, Naohiro Sugita, Tadahiko Shinshi.

Language

English

Journal/Book name

Japanese:
English:	Proc. of the 9th Intl. Conf. of Asian Society for Precision Engg. and Nanotechnology (ASPEN 2022)

Volume, Number, Page

pp. 571-572

Published date

Nov. 15, 2022

Publisher

Japanese:
English:

Conference name

Japanese:
English:	The 9th International Conference of ASPEN（ASPEN 2022）

Conference site

Japanese:
English:	Singapore

DOI