A MAGNETIC ACTUATOR USING PLD-MADE FEPT THICK FILM AS A PERMANENT MAGNET AND MEMBRANE MATERIAL FOR BIDIRECTIONAL MICROPUMPS

Publication Information

Title

Japanese:
English:	A MAGNETIC ACTUATOR USING PLD-MADE FEPT THICK FILM AS A PERMANENT MAGNET AND MEMBRANE MATERIAL FOR BIDIRECTIONAL MICROPUMPS

Author

Japanese:	QI Chao, 永井慧大, Ming Ji, Yu Miyahara, 杉田直広, 進士忠彦, Masaki Nakano, 佐藤千明.
English:	Chao Qi, Keita Nagai, Ming Ji, Yu Miyahara, Naohiro Sugita, Tadahiko Shinshi, Masaki Nakano, Chiaki Sato.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

978-1-6654-9306-2/22/$31.00

Published date

Dec. 12, 2022

Publisher

Japanese:
English:

Conference name

Japanese:
English:	PowerMEMS 2022

Conference site

Japanese:
English:	Salt Lake City