Fast 3D lithography simulation by convolutional neural network: POC study

Publication Information

Title

Japanese:
English:	Fast 3D lithography simulation by convolutional neural network: POC study

Author

Japanese:	田邊容由, 佐藤真平, 高橋篤司.
English:	Hiroyoshi Tanabe, Shimpei Sato, Atsushi Takahashi.

Language

English

Journal/Book name

Japanese:
English:	Proc. SPIE 11518, Photomask Technology 2020, 115180L

Volume, Number, Page

Published date

Sept. 20, 2020

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English:

DOI