ボロノイ分割と繰り返し改善によるマスク最適化手法

Publication Information

Title

Japanese:	ボロノイ分割と繰り返し改善によるマスク最適化手法
English:	Mask Optimization Using Voronoi Partition and Iterative Improvement

Author

Japanese:	野中尚貴, 小平行秀, 高橋篤司, 児玉親亮.
English:	Naoki Nonaka, Yukihide Kohira, Atsushi Takahashi, Chikaaki Kodama.

Language

Japanese

Journal/Book name

Japanese:	電子情報通信学会技術研究報告 (VLD2022-41)
English:	IEICE Technical Report (VLD2022-41)

Volume, Number, Page

Vol. 122 No. 283 pp. 127-132

Published date

Nov. 2022

Publisher

Japanese:
English:

Conference name

Japanese:	VLSI設計技術研究会
English:	Technical Committee on VLSI Design Technologies

Conference site

Japanese:
English: